Ce:YAG single crystal is a fast-decay scintillation material with excellent comprehensive properties, with high light output (20000 photons/MeV), fast luminous decay (~70ns), excellent thermomechanical properties, and luminous peak wavelength (540nm) It is well matched with the receiving sensitive wavelength of ordinary photomultiplier tube (PMT) and silicon photodiode (PD), good light pulse distinguishes gamma rays and alpha particles, Ce:YAG is suitable for detecting alpha particles, electrons and beta rays, etc. The good mechanical properties of charged particles, especially Ce:YAG single crystal, make it possible to prepare thin films with a thickness of less than 30um. Ce:YAG scintillation detectors are widely used in electron microscopy, beta and X-ray counting, electron and X-ray imaging screens and other fields.